33-4 | High Performance 2.5V N&P 400°C SOI MOSFETs: A Breakthrough for Versatile 3D Sequential Integration

Type

Technical Session

Paper & Video Presentation

Description

Speakers

Presenting Author

CEA-Leti

Tracks

Advanced Logic Technology (ALT)

Parent Sessions

Wed. Dec. 10 | 9:00 AM - 12:50 PM – 33 | ALT | BEOL-Compatible Devices and Interconnect Technology